The adoption of a linear shaft motor realizes ultra-thin (30mm) XY stage with high accuracy and ultra-low vibration.
Features
- Ultra Thin Stage Thickness 30mm
- Open frame structure
- XY travel 45/30mm stroke
- Joystick control is also available with the controller FMAX-4X-2D
- Positioning resolution 0.05μm
- High-speed control Max. speed 200mm/sec (at 4Mpps)
- Excellent quietness
- Bonding during tiling is also achieved with high accuracy.
Features of Shaft Motor
- High-speed operation (tact-up)
- High Precision Positioning (Fully Closed Control)
- Overwhelming speed stability
- High-speed settling (high response)
- Easy replacement of ball screw mechanism in shape
- Multi-drive possible with one shaft
- Multiple synchronous parallel drives possible with a single driver
- Excellent durability (reduced maintenance costs) due to non-contact type motors
- Low particle generation
- Can be used in adverse environments such as water, oil, contamination, dust, etc.